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An integrated MEMS three-dimensional tactile sensor with large force range

Tao Mei, Wen J. Li, Ge Yu, Yong Chen, Lin Ni, Ming Ho Chan

发表年份
2000
引用次数
136

关键词

Tactile sensorMicroelectromechanical systemsSurface micromachiningFabricationContact forceFinite element methodBulk micromachiningMaterials scienceCapacitive sensingAcoustics

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