OTHER
An integrated MEMS three-dimensional tactile sensor with large force range
Tao Mei, Wen J. Li, Ge Yu, Yong Chen, Lin Ni, Ming Ho Chan
- Year
- 2000
- Citations
- 136
Keywords
Tactile sensorMicroelectromechanical systemsSurface micromachiningFabricationContact forceFinite element methodBulk micromachiningMaterials scienceCapacitive sensingAcoustics
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