Modeling and Simulation of MEMS based 3D Vibrating Gyroscope for Mobile Robotic Applications

摘要

Mobile Robotic Systems are typically used for applications where direct human involvement is too expensive, too dangerous, or just ineffective. MEMS gyroscopes provide a feedback sensing mechanism that can be very useful in optimizing navigation system performance. In this study, a biomimetic vibrating 3D MEMS Gyroscope is designed, consisting of two circular diaphragms with a club shaped structure placed over one of them. This MEMS based vibrating gyroscope was modeled and simulated using COMSOL Multiphysics 4.1 - MEMS module. In this model there are two modes - driving mode and sensing mode. The driving force is given in the x-direction and the displacement due to the Coriolis effect is sensed in the y-direction. The purpose of the research was to develop an effective gyroscope for guidance and control of mobile robots. The simulated results show that the displacement due to Coriolis effect, used for restoring the body back to its initial position, was greater when compared to that of the electrostatic force. These results let us to conclude that this gyroscope would provide valuable orientation information for robotics applications. MEMS gyroscope technology provides cost-effective methods for improving directional estimation and overall accuracy in the navigation systems.