Papers
46
Total Citations
1,962
H-Index
22
About
Naiqi Wu is a leading researcher in the field of automated semiconductor manufacturing systems, with a particular focus on cluster tool scheduling, Petri net modeling, and deadlock resolution. His work has fundamentally advanced the theoretical and practical understanding of wafer fabrication processes, addressing some of the most complex scheduling challenges in modern microelectronics manufacturing. Wu's most influential contributions center on developing rigorous mathematical frameworks — particularly Petri net-based models — for scheduling single-arm and dual-arm cluster tools under strict wafer residency time constraints. His landmark 2008 paper on single-arm cluster tool schedulability (230 citations) and his 2009 closed-form solution for dual-arm tools (180 citations) established foundational analytical approaches that the semiconductor automation community continues to build upon. He further extended this work to address reentrant atomic layer deposition processes, multicluster tool topologies, and real-world concerns such as close-down procedures and activity time variation. His 2017 survey on cluster tool scheduling (123 citations) demonstrates his broad mastery of the field and serves as an essential reference for researchers entering the area. Collectively, Wu's papers have accumulated well over 1,300 citations, reflecting his sustained and substantial impact on intelligent manufacturing, robotics scheduling, and semiconductor process automation.
Research Focus
Key Achievements
Top Papers
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- 7Deadlock Resolution in Automated Manufacturing Systems With Robots110 citations · 2007
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