Wafer

Waterproof AlInGaP optoelectronics on stretchable substrates with applications in biomedicine and robotics

Rak-Hwan Kim, Dae‐Hyeong Kim, Jianliang Xiao, Bong Hoon Kim, Sang-Il Park, Bruce Panilaitis, Roozbeh Ghaffari, Jimin Yao, Ming Li, Zhuangjian Liu, Viktor Malyarchuk, Dae Gon Kim, An‐Phong Le, Ralph G. Nuzzo, David L. Kaplan, Fiorenzo G. Omenetto, Yonggang Huang, Zhan Kang, John A. Rogers

Citations: 639 • 2010

Electronically integrated, mass-manufactured, microscopic robots

Marc Z. Miskin, Alejandro J. Cortese, Kyle Dorsey, Edward Esposito, Michael Reynolds, Qingkun Liu, Michael C. Cao, David A. Muller, Paul L. McEuen, Itai Cohen

Citations: 344 • 2020

Scheduling analysis of time-constrained dual-armed cluster tools

Ja-Hee Kim, Tae‐Eog Lee, Hwan-Yong Lee, D.-J. Park

Citations: 275 • 2003

A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints

Naiqi Wu, Chengbin Chu, Feng Chu, Meng Zhou

Citations: 230 • 2008

Piezoelectric micromotors for microrobots

Anita M. Flynn, Lee S. Tavrow, Stephen F. Bart, Rodney A. Brooks, D. J. Ehrlich, Krishna Udayakumar, L. E. Cross

Citations: 229 • 1992

A fast flexible ink-jet printing method for patterning dissociated neurons in culture

Neville E. Sanjana, Sawyer B. Fuller

Citations: 226 • 2004

Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation Based on Petri Nets

Nai Qi Wu, MengChu Zhou

Citations: 209 • 2012

Sensitive Electronic-Skin Strain Sensor Array Based on the Patterned Two-Dimensional α-In₂Se₃

Wei Feng, Wei Zheng, Feng Gao, Guangbo Liu, Tawfique Hasan, Wenwu Cao, PingAn Hu

Citations: 189 • 2016

Timed Petri nets in modeling and analysis of cluster tools

W.M. Zuberek

Citations: 182 • 2001

Achromatic super-oscillatory lenses with sub-wavelength focusing

Guang Yuan, Edward T. F. Rogers, Nikolay I. Zheludev

Citations: 168 • 2017

An Extended Event Graph With Negative Places and Tokens for Time Window Constraints

Tae‐Eog Lee, Sanghoo Park

Citations: 150 • 2005

Petri Net-Based Scheduling of Single-Arm Cluster Tools With Reentrant Atomic Layer Deposition Processes

Naiqi Wu, Feng Chu, Chengbin Chu, MengChu Zhou

Citations: 148 • 2010

Scheduling Single-Armed Cluster Tools With Reentrant Wafer Flows

Hyunjae Lee, Tae‐Eog Lee

Citations: 131 • 2006

A review of scheduling theory and methods for semiconductor manufacturing cluster tools

Tae‐Eog Lee

Citations: 123 • 2008

Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges

Chunrong Pan, MengChu Zhou, Yan Qiao, Naiqi Wu

Citations: 123 • 2017

Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools

QingHua Zhu, MengChu Zhou, Yan Qiao, Naiqi Wu

Citations: 112 • 2016

Scheduling Cluster Tools With Ready Time Constraints for Consecutive Small Lots

Hyun-Jung Kim, Jun-Ho Lee, Chihyun Jung, Tae‐Eog Lee

Citations: 109 • 2012

Novel automated process for aspheric surfaces

R. Bingham, David Walker, Do Hyung Kim, David Brooks, R. R. Freeman, Darren L. Riley

Citations: 108 • 2000

Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm

Hyun-Jung Kim, Jun-Ho Lee, Tae‐Eog Lee

Citations: 100 • 2014

A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication

Yang Ge, J. A. Gaines, Bradley J. Nelson

Citations: 98 • 2003