ZiCheng Liu
Papers
2
Total Citations
8
H-Index
2
About
ZiCheng Liu is a leading researcher in the modeling, scheduling, and control of automated semiconductor manufacturing systems, with a particular focus on cluster tools. His work addresses one of the most challenging problems in the field: ensuring that wafer residency time constraints are satisfied in single-arm cluster tools during complex processes like atomic layer deposition (ALD), where wafers must revisit the same chamber multiple times. Liu’s major contributions include the development of innovative scheduling strategies, such as the p-backward approach, which enables optimal, time-constrained operation of these tools. His most-cited paper (2016, 6 citations) and a closely related follow-up (2016, 2 citations) are foundational studies that provide rigorous solutions to this difficult scheduling problem, offering both theoretical insights and practical algorithms. By solving these critical bottlenecks, Liu’s work directly enhances the efficiency, reliability, and throughput of advanced semiconductor fabrication, making him a key figure in the intersection of discrete event systems and manufacturing automation.
Research Focus
Key Achievements
Top Papers
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