Papers
4
Total Citations
397
H-Index
4
About
Feng Chu is a leading authority in the modeling, scheduling, and real-time control of semiconductor manufacturing systems, with a particular focus on cluster tools. Her research centers on applying Petri net (PN) theory to solve complex operational challenges in wafer fabrication, especially those involving stringent wafer residency time constraints and reentrant processes like atomic layer deposition (ALD). Chu’s major contributions include developing novel PN-based methods to address the previously open problems of schedulability and scheduling for single-arm cluster tools, as demonstrated in her highly cited 2008 paper (230 citations). She also pioneered PN models for systems with wafer revisiting, a critical requirement for advanced ALD processes, with her 2010 work garnering 148 citations. Additionally, her research extends to the real-time control of dual-arm cluster tools under activity time variations, showcasing her ability to bridge theoretical modeling with practical automation. With a total of nearly 400 citations across her most influential works, Chu’s rigorous analytical frameworks have become foundational for researchers and engineers seeking to optimize throughput and ensure process integrity in modern semiconductor fabs.
Research Focus
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