Papers
5
Total Citations
95
H-Index
5
About
Yan Hou is a leading researcher in semiconductor manufacturing automation, specializing in the scheduling and optimization of robotic cluster tools—the core equipment used to fabricate integrated circuit wafers. Her work addresses critical challenges in modern wafer fabrication, including multi-objective scheduling for dual-blade robots, time-aware post-processing optimization, and the coordination of single-arm and dual-arm multi-cluster tools. She has made significant contributions to improving throughput and reliability under constraints such as wafer residency time limits and process module failures. Her most-cited papers, including “Post-processing time-aware optimal scheduling of single robotic cluster tools” and “Multiobjective Scheduling of Dual-Blade Robotic Cells in Wafer Fabrication,” each with 26 citations, demonstrate the practical impact of her research. Notably, her 2023 studies on scheduling for two-type wafers with lower-bound cycle time and managing module failures under residency constraints have advanced the field’s ability to handle mixed-product manufacturing and system disruptions. Yan Hou’s work is essential reading for researchers and engineers seeking to enhance efficiency, flexibility, and robustness in semiconductor fabrication systems.
Research Focus
Key Achievements
Top Papers
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- 2Multiobjective Scheduling of Dual-Blade Robotic Cells in Wafer Fabrication26 citations · 2019
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