Purge

Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations

Tae-Sun Yu, Hyun-Jung Kim, Tae‐Eog Lee

引用数: 61 • 2017

UVC-PURGE: A Novel Cost-Effective Disinfection Robot for Combating COVID-19 Pandemic

Akib Zaman, Mohammad Shahjahan Majib, Shoeb Ahmed Tanjim, Shah Md. Ahasan Siddique, Shafayetul Islam, Md Shadman Aadeeb, Nafiz Imtiaz Khan, Riasat Haque, Md Rashid Ul Islam, Mohd Faisal, Siddharth Malik, Muhammad Nazrul Islam

引用数: 33 • 2022

Scheduling of time-constrained single-arm cluster tools with purge operations in wafer fabrications

Fenglian Yuan, Qingling Zhao, Bo Huang, Chunrong Pan

引用数: 7 • 2022

Sludge mobilization with submerged nozzles in horizontal cylindrical tanks

T.D. Hylton, R.L. Cummins, E.L. Youngblood, J.J. Perona

引用数: 3 • 1995