Novel Force Sensor Using Vibrating Piezoelectric Element

摘要

We propose a novel tactile sensor, of which sensitivity and sensing range is adjustable. This sensor is a mechanical resonator sensor using a piezoelectric bimorph which measures elastic deformation of media by external force. The sensor is robust and has self-sensing capability. We derived the relationship between sensor output and spring constant at each vibration mode by the piezoelectric analysis and vibration analysis. The validity of sensor was demonstrated by experiment. As an application, a robot fingertip with tactile sensor was fabricated and evaluated.