Design and Implementation of a Micromanipulation System Using a Magnetically Levitated MEMS Robot

摘要

Magnetic levitation of microrobots is presented as a new technology for micromanipulation tasks. The microrobots were fabricated based on microelectromechanical systems technology and weigh less than 1 g. The robots can be positioned in 3-D using magnetic field. It is shown that microrobots can be produced using commercially available magnets or electrodeposited magnetic films. A photothermal microgripper is integrated to the microrobots to perform micromanipulation operations. The microgrippers can be actuated remotely by laser focusing that makes the microrobot free of any wiring. This leads to increased motion range with more functionality in addition to dust-free motion and ability to work in closed environments. The 3-D motion capability of the microrobots is verified experimentally and it was demonstrated that the microgrippers can be operated in a vertical range of 4 mm and a horizontal range of 4 mm times 5 mm. Micromanipulation experiments such as pick-and-place, pushing, and pulling were demonstrated using objects with 100 mum and 1 mm diameter.