Deep reactive-ion etching

A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication

Yang Ge, J. A. Gaines, Bradley J. Nelson

Citations: 98 • 2003

A three-axis high-resolution capacitive tactile imager system based on floating comb electrodes

Rajesh Surapaneni, Qingbo Guo, Yannan Xie, Darrin J. Young, C. H. Mastrangelo

Citations: 43 • 2013

3D force sensors for laparoscopic surgery tool

J Radó, Csaba Dücső, Péter Földesy, Gábor Szebényi, Zbigniew Nawrat, Kamil Rohr, Péter Fürjes

Citations: 32 • 2017

Design Tradeoffs for Electrothermal Microgrippers

Mohammad Mayyas, Ping Zhang, Woo H. Lee, Panos S. Shiakolas, Dan O. Popa

Citations: 21 • 2007

Ultra-Thin Silicon based Piezoelectric Capacitive Tactile Sensor

Shoubhik Gupta, Flavio Giacomozzi, Hadi Heidari, Leandro Lorenzelli, Ravinder Dahiya

Citations: 17 • 2016

3D force sensors for laparoscopic surgery tool

J Radó, Csaba Dücső, G. Battistig, Gábor Szebényi, Péter Fürjes, Zbigniew Nawrat, Kamil Rohr

Citations: 13 • 2016

New integrated silicon-PDMS process for compliant micro-mechanisms

Wissem Haouas, Redwan Dahmouche, Joël Agnus, Nadine Le Fort-Piat, Guillaume J. Laurent

Citations: 12 • 2017

Water-based high-volume stress-free ultra-thin powder-chip method

Hideyuki Noda, M. Usami, Akira Sato, Satoshi Terasaki, Hironori Ishizaka

Citations: 3 • 2009

Calibration Systems and Techniques for Automated Microassembly

K. Tsui, A. Geisberger, M. Ellis, George D. Skidmore

Citations: 3 • 2003

Micromachined low-mass RF front-end for beam steering radar

Mehrnoosh Vahidpour, Meysam Moallem, J.R. East, Kamal Sarabandi

Citations: 2 • 2012

An active locking mechanism for assembling 3D micro structures

Ping Zhang, Mohammad Mayyas, Woo Ho Lee, Dan O. Popa, Panos S. Shiakolas, H.E. Stephanou, J.‐C. Chiao

Citations: 2 • 2006