Design of cooperative microrobots with impedance optimization

Abstract

This paper deals with the design optimization and development of cooperative microrobots. We realize several prototypes by micro-stererophotolithographic (/spl mu/SPL) process, actuated by shape memory alloy (SMA) wire micromotors. The integration of displacement and temperature microsensors is considered. Our aim is to realise cooperative micromanipulation of microobjects in the applications such as microcatheters and micro-assembling devices. The compliance and impedance controls of the microrobots are considered. We introduce the thermomechanical behavior of the SMA microactuators and the mechanical characteristics of polymer robot in an incremental dynamic model of the microrobot. We obtain the impedance model of the integrated microsystem and identify the main influencing design parameters. We also develop a neuronal bond graph formalism that is used for the adaptive modeling of partial dynamic hysteresis cycles.