Optimized Scratch Drive Actuator for Tethered Nanometer Positioning of Chip-Sized Components

摘要

A novel surface micromachined robot, capable of pushing a 2x2x0.5 mm chip several millimeters while being powered by a gold wire tether is presented. The micro robot uses a unique assembly and packaging process and is created from large arrays of scratch drive actuators (SDA) tethered by gold wires bonded prior to release in an HF acid bath. The wire tether allows for robot transfer to other substrates and driving surfaces, where assembly line positioning tasks can be performed. A device model has been derived to define optimum SDA plate design for any fabrication process. The driving signal has also been optimized, consuming much less electrical power than previously published signals.