MANIPULATION
Design, fabrication, and testing of a 3-DOF HARM micromanipulator on (111) silicon substrate
Heng-Chung Chang, J. M. Tsai, Hsin-Chang Tsai, Weileun Fang
- 发表年份
- 2005
- 引用次数
- 25
关键词
MicromanipulatorWaferActuatorFabricationSurface micromachiningMaterials scienceSiliconRobotComb drivePrecision engineering
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