MANIPULATION
Design, fabrication, and testing of a 3-DOF HARM micromanipulator on (111) silicon substrate
Heng-Chung Chang, J. M. Tsai, Hsin-Chang Tsai, Weileun Fang
- Year
- 2005
- Citations
- 25
Keywords
MicromanipulatorWaferActuatorFabricationSurface micromachiningMaterials scienceSiliconRobotComb drivePrecision engineering
Related papers
PERCEPTION
📊 22,245 cites
Artificial intelligence: a modern approach
1995
OTHER
📊 10,390 cites
Self-Organizing Maps
Teuvo Kohonen
1995
PERCEPTION
📊 9,681 cites
Vision meets robotics: The KITTI dataset
Andreas Geiger, Philip Lenz, Christoph Stiller +1 more
2013
OTHER
📊 8,006 cites
Probabilistic robotics
Sebastian Thrun
2002