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Design, fabrication, and testing of a 3-DOF HARM micromanipulator on (111) silicon substrate

Heng-Chung Chang, J. M. Tsai, Hsin-Chang Tsai, Weileun Fang

Year
2005
Citations
25

Keywords

MicromanipulatorWaferActuatorFabricationSurface micromachiningMaterials scienceSiliconRobotComb drivePrecision engineering

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