OTHER
A novel a-Si:H mechanical stress sensor
G. de Cesare, M. Gavesi, F. Palma, B. Riccò
- 发表年份
- 2003
- 引用次数
- 29
关键词
Piezoresistive effectMaterials scienceFabricationTorsion (gastropod)Microelectromechanical systemsAmorphous solidBendingComposite materialThin filmOptoelectronics
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