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A novel a-Si:H mechanical stress sensor

G. de Cesare, M. Gavesi, F. Palma, B. Riccò

Year
2003
Citations
29

Keywords

Piezoresistive effectMaterials scienceFabricationTorsion (gastropod)Microelectromechanical systemsAmorphous solidBendingComposite materialThin filmOptoelectronics

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