Hiroyuki YAMADA

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Research Focus

Key Achievements

Top Papers

1. 1
   Integration and packaging technology of MEMS-on-CMOS capacitive tactile sensor for robot application using thick BCB isolation layer and backside-grooved electrical connection

   31 citations · 2012
2. 2
   An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection

   14 citations · 2011
3. 3
   Integration and packaging technology of MEMS-on-CMOS tactile sensor for robot application using molded thick BCB layer and backside-grooved electrical connection

   5 citations · 2011
4. 4
   SOI 3-axis accelerometer with a stress reduction structure

   4 citations · 2014
5. 5
   Flipped CMOS-diaphragm capacitive tactile sensor surface mountable on flexible and stretchable bus line

   3 citations · 2015
6. 6
   MEMS-CMOS Integrated Tactile Sensor with Digital Signal Processing for Robot Application

   2 citations · 2012

Key Collaborators