Papers
6
Total Citations
59
H-Index
4
About
Hiroyuki Yamada is a leading researcher in MEMS (Micro-Electro-Mechanical Systems) and CMOS integration, with a primary focus on developing advanced tactile sensors and accelerometers for robotic and automotive applications. His major contributions include pioneering a novel integration and packaging technology for MEMS-on-CMOS capacitive tactile sensors, utilizing a thick BCB isolation layer and backside-grooved electrical connections—a method that enables chip-size packaging and robust performance for robot skin. Yamada also developed a fully-differential SOI 3-axis accelerometer featuring a unique zigzag-shaped Z-electrode, which significantly enhances sensitivity and stability for motion control in automobiles and robots. His work on stress reduction structures for accelerometers further improves temperature stability, while his flipped CMOS-diaphragm tactile sensor design allows surface mounting on flexible, stretchable bus lines—ideal for covering social robot bodies. With over 30 citations for his foundational tactile sensor paper and a portfolio of innovations in digital signal processing integration, Yamada’s research has directly advanced the practicality of MEMS-CMOS systems in real-world robotics and automotive sensing.
Research Focus
Key Achievements
Top Papers
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- 4SOI 3-axis accelerometer with a stress reduction structure4 citations · 2014
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