Highly Integrated PiezoMEMS Enabled Millimeter-Scale Robotics

Abstract

This report provides an overview of ongoing research at the U.S. Army Research Laboratory regarding the development of piezoelectric MEMS-enabled millimeter-scale robotics. Research topics include the development of enabling technologies for terrestrial locomotion, insect-inspired micro-flight, gecko-inspired reversible adhesives, and piezoelectric energy harvesting. The development of complementary lead zirconate titanate thin film MEMS devices, applicable to highly integrated millimeter-scale robotics, is also reviewed.