OTHER
Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon vias
Yoshiyuki Hata, Yukio Suzuki, Masanori Muroyama, Takahiro Nakayama, Yutaka Nonomura, Rakesh Chand, Hideki Hirano, Y. Omura, Motohiro Fujiyoshi, Shuji Tanaka
- Year
- 2018
- Citations
- 31
Keywords
Capacitive sensingTactile sensorMicroelectromechanical systemsMaterials scienceChipSIGNAL (programming language)Shielded cableElectrical engineeringElectronic engineeringEngineering
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