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Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon vias

Yoshiyuki Hata, Yukio Suzuki, Masanori Muroyama, Takahiro Nakayama, Yutaka Nonomura, Rakesh Chand, Hideki Hirano, Y. Omura, Motohiro Fujiyoshi, Shuji Tanaka

Year
2018
Citations
31

Keywords

Capacitive sensingTactile sensorMicroelectromechanical systemsMaterials scienceChipSIGNAL (programming language)Shielded cableElectrical engineeringElectronic engineeringEngineering

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