An Ultra Precision Production System Organized by Miniature Robots (2nd Report)

摘要

This paper describes a miniature robot which has been developed for the flexible micro indentation. The basic mechanism of this small robot is the combination of piezo elements for microscopic locomotion and electromagnet for clamping on the working surface. This arrangement can give the precise mobility on any curved surface without special guideways. In order to provide micro manipulation, the small electromagnet actuator of voice coil motor with 2 control axes is mounted on it. This electromagnet actuator is also capable of locating the position of micro tool in lateral and indenting the tool on the sample. In the experiment, the performances such that the small robot can travel precisely and provide several micro dents of 2 μ m to 200 μm in diameter are presented. With the help of the CCD camera vision instrument and the computer assisted control system that can monitor the coordinate position of the small robot and govern its motion, it succeeds in moving to the specified working area automatically and providing small Japanese characters which are composed of microscopic dents within 100 μm square.