Research on integrated micromanipulator and its application in microassembly

摘要

Micromanipulator is the key component of a micromanipulating robot. According to the principle of piezoelectric scanner, a three degree-of-freedom micromanipulator driven by piezoelectric tubes is developed. The integration of mechanism, actuator and sensor is realized. The formula establishing the relationship between microdisplacement and driving voltage is given. The micropositioning control system is introduced, including the bipolar piezoelectric driver and micropositioning measuring system. Some static and dynamic characteristics of the micromanipulator are gained. Based on this, the micromanipulator is applied to a micromanipulating robot. Thanks to micro-vision and micro-force perceiving, macro-micro-positioning is performed. As a result, the peg-in-hole with diameter of 0.2 mm is finished successfully by rational microassembly strategy.