Experimental research on laser tracking system with galvanometer scanner for measuring spatial coordinates of moving target

摘要

The spatial position of industrial object, such as robot end- effector, is an important geometric parameter whose accuracy determines whether robot can perform accurately. Therefore, we have established a laser tracking and coordinate measuring system with galvanometer scanner for high accuracy, large range, non- contact, and spatial dynamic measurement. In this paper, the laser tracking system and its setup are illuminated at first. Then, the formulae for calculating coordinates are deduced, and the calibration method of the initial distance from tracking mirror to target is presented. After that, two preliminary experiments in different distances are described. One is on CMM; the other is with grating ruler as reference. In the former, the maximum measurement error of coordinates is 70micrometers and the maximum error of length is 35micrometers in the 85x100x100mm<SUP>3</SUP> measurement volume, and in the 1m initial distance. In the later, the maximum error of length is 140micrometers in the range of 480mm, and in the 5m initial distance. At the end of the paper, the error sources are analyzed and simulated.