3D fabrication and manipulation of hybrid nanorobots by laser for single cell analysis

摘要

We developed fabrication and manipulation of hybrid nanorobos by 3D nano exposure and optical tweezers. Hybrid nanorobot is composed of photoresist and silicon nanowire. The robot is fabricated by femtosecond laser exposure and is connected by a micropillar on the glass substrate. The robot is released by cut of the pillar by ablation with femtosecond laser. The released robot is manipulated by holographic optical tweezers. The robot can be used for nano thermal sensor by impregnating the temperature indicator in the robot using the silicon nanowire which has high thermal conductivity. In this paper, we demonstrated fabrication, on-demand release, and manipulation of the robot in a solution. We also demonstrated the basic evaluation of the robot as thermal sensor.