Development of microgripper system

摘要

The paper presents the experimental development of micro/nano robotic cell for assembling the micro objects. Three techniques for gripping of micro objects with micro/nano robot are presented. The first one uses a two finger gripper and is suitable for objects which are greater than 100 μm. The next technique uses the micro tube for development of pneumatic gripper and can be used for objects greater than 70 μm. The third technique is called a one finger gripper, which can be used for objects smaller than 70 μm. The 5 DOF micro/nano robot mechanism with linear step piezoelectric motors and its control system with man-machine communication are also described.