A high sensitivity, low cost and fully decoupled multi-axis capacitive tactile force sensor for robotic surgical systems

摘要

This paper presents the design of a multi-axis capacitive tactile force sensor with a fully decoupled output response for input normal and shear forces. A patterned elastomer is used as a dielectric layer between capacitive electrodes of the sensor that allows to achieve relatively higher sensitivity. The sensor is fabricated utilizing a low-cost rapid prototyping technique and is characterized for normal and shear forces in the range of 0 ~ 10 N and 0 ~ 3.1 N respectively. The achieved force sensitivity for the normal axis is 2.03%/N and for shear axes is 1.67%/N. The difference between the estimated force from the sensor and actual force applied is negligible, which demonstrates the accuracy of the sensor. The reliability of the sensor is analysed by performing hysteresis and repeatability tests. The hysteresis error is found to be 4.94% and 4.69% for normal and shear forces respectively. The repeatability error of the sensor is less than 5%, which shows the stability of the sensor. The high sensitivity, linear output response, high force measurement range, reliability and low cost make the proposed tactile sensor suitable for the force feedback in the robotic surgical systems.