<title>MEMS/NEMS development for space applications at NASA/JPL</title>

摘要

This paper presents an overview of the current technology development activities of the MEMS Technology Group at JPL> The group, in collaboration with other research groups at JPL and outside institutions, pursues the development of a wide range of MEMS/NEMS technologies that are primarily applicable to NASA's needs in the area of robotic planetary exploration. The broad classes of technologies being developed include inertial guidance devices, micro- propulsion devices, and adaptive optics for telescope applications, micro-instruments and nano-mechanical resonator devices. End-to-end prototype development of these MEMS/NEMS technologies is conducted at JPL's state-of-the- art Microdevices Laboratory. The group is also pursuing the establishment of a rapid, space-testing program in collaboration with the Aerospace Corporation, in an effort to overcome the traditional barriers to the insertion of new technologies into space missions.