Development of a Small Two Axis Spherical Motor Type Laser Tracker with Submicron Measurement Accuracy

摘要

Recently, it is in great need for measurement of the three dimensional surface form of the car and the aircraft, the path of the industrial robot and the machine tool, and so on with a high degree of accuracy. We have proposed a novel laser tracking three dimensional position measurement system which can measure the 3D position with submicron accuracy at more than 1[m] by combining the oscillating lever mechanism with the spherical motor. Before making the full system, we made the first and the second prototype spherical motor type laser tracker unit and tested them. The average measurement error of the developed laser tracker 2 is 0.45[μm] and the standard deviation is 0.54[μm], which satisfy the specifications needed for the full system.