<title>Potential applications of electroactive polymer sensors and actuators in MEMS technologies</title>

摘要

This paper first presents a state of the art on electroactive polymer sensors and actuators and some experimental data pertaining to them. The paper then discusses the current state of the art in MEMS technologies in connection with robotic micro-manipulation and assembly as well as sensing and actuation. The paper then discusses the potential applications of electroactive polymer sensors and actuators to micro- electromechanical systems (MEMS) technologies such as microgripper and microsensor, microactuator arrays and microsensor arrays, micropumps, and micro-robots with sensing and actuation capability. It further discusses a number of potential industrial as well as biotechnological and medical applications requiring MEMS technologies that can benefit from the advances made in recent years in electroactive polymer sensors and actuators. The paper in particular presents modeling, design, fabrication and testing of a number of micromanipulators and multi-fingered robotic hands.