An automated wafer-handling system based on the integrated circuit equipments

摘要

Based on the integrated circuit equipments, this paper respectively introduces the constitute and function of the automated wafer-handling system, the design and principle of the wafer-handling robot, wafer positioning system, and end-effector calibration system. This paper studies the up-down and rotation component, radial linear stretch component, end rotation component and the principle of work. The kinematics analysis of the linear mechanism of radial stretch component is presented