Silicon on insulator

Solar powered 10 mg silicon robot

S. Hollar, Anita M. Flynn, Colby Bellew, Kristofer S. J. Pister

Citations: 172 • 2003

First steps of a millimeter-scale walking silicon robot

Daniel S. Contreras, Daniel Drew, Kristofer S. J. Pister

Citations: 41 • 2017

Flexible tactile sensor for shear stress measurement using transferred sub-µm-thick Si piezoresistive cantilevers

Kentaro Noda, Hiroaki Onoe, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

Citations: 30 • 2012

Electrostatic actuation and control of micro robots using a post-processed high-voltage SOI CMOS chip

Mustafa Emre Karagozler, Anil Keshavlal Thaker, Seth Copen Goldstein, David S. Ricketts

Citations: 29 • 2011

A hybrid estimation framework for Cooperative Localization under communication constraints

Esha D. Nerurkar, Ke Zhou, Stergios I. Roumeliotis

Citations: 22 • 2011

Design Tradeoffs for Electrothermal Microgrippers

Mohammad Mayyas, Ping Zhang, Woo H. Lee, Panos S. Shiakolas, Dan O. Popa

Citations: 21 • 2007

Robot leg motion in a planarized-SOI, two-layer poly-Si process

S. Hollar, Anita M. Flynn, Sarah Bergbreiter, Kristofer S. J. Pister

Citations: 20 • 2005

ChevBot – An Untethered Microrobot Powered by Laser for Microfactory Applications

Ruoshi Zhang, Andriy Sherehiy, Yang Zhong, Danming Wei, C. K. Harnett, Dan O. Popa

Citations: 19 • 2019

A large range multi-axis capacitive force/torque sensor realized in a single SOI wafer

Dennis Alveringh, R.A. Brookhuis, Remco J. Wiegerink, Gijs Krijnen

Citations: 14 • 2014

An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection

Motohiro Fujiyoshi, Yutaka Nonomura, H. Funabashi, Y. Omura, T. Akashi, Yoshiyuki Hata, Hiroyuki YAMADA, M. Esashi

Citations: 14 • 2011

Design and Validation of Silicon-on-Insulator Based U Shaped Thermal Microactuator

Vijay Kumar, Niti Nipun Sharma

Citations: 14 • 2013

A SIX-LEGGED MEMS SILICON ROBOT USING MULTICHIP ASSEMBLY

Daniel S. Contreras, K.S.J. Pister

Citations: 14 • 2018

3D force sensors for laparoscopic surgery tool

J Radó, Csaba Dücső, G. Battistig, Gábor Szebényi, Péter Fürjes, Zbigniew Nawrat, Kamil Rohr

Citations: 13 • 2016

Micro robot system with moving micro-car driven by electrostatic comb-drive actuators

Phuc Hong Pham, Lam Bao Dang, Hung N. Vu

Citations: 10 • 2010

Pixel-Parallel Three-Layer Stacked CMOS Image Sensors Using Double-Sided Hybrid Bonding of SOI Wafers

Masahide Goto, Yuki Honda, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

Citations: 9 • 2023

Robot Leg Motion in a Planarized-SOI, 2 Poly Process

S. Hollar, Anita M. Flynn, Sarah Bergbreiter, Kristofer S. J. Pister

Citations: 8 • 2002

Designing a Power and Speed Adaptive 60 GHz Receiver in 22 nm FD-SOI CMOS for Tactile Internet Applications

Helmuth P. E. Morath, Xin An, Matthias Jobst, Mengqi Cui, Jens Wagner, Christian Mayr, Frank Ellinger

Citations: 7 • 2024

Development and Research of the Sensitive Element of the MEMS Gyroscope Manufactured Using SOI Technology

Д В Науменко, Alexey Tkachenko, Igor Lysenko, Andrey Kovalev

Citations: 6 • 2023

A data analytics case study analyzing IRS SOI migration data using no code, low code technologies

Samy Garas, Susan Wright

Citations: 6 • 2024

Design, fabrication and characterization of an autonomous, sub-millimeter scale modular robot

Seth Copen Goldstein, David S. Ricketts, Mustafa Emre Karagozler

Citations: 6 • 2012