Proximity effect (electron beam lithography)

Related papers: 1

Top Researchers

Ping Liu

Institution: —

Caixia Liu

Institution: —

Ying Huang

Institution: —

Shihua Qiu

Institution: —

Xiaoyue He

Institution: —

Zhiguang Sun

Institution: —

Top Cited Papers

A dual-mode proximity sensor with integrated capacitive and temperature sensing units

Shihua Qiu, Ying Huang, Xiaoyue He, Zhiguang Sun, Ping Liu, Caixia Liu

Citations: 23 • 2015

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