Proximity effect (electron beam lithography)
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A dual-mode proximity sensor with integrated capacitive and temperature sensing units
Shihua Qiu, Ying Huang, Xiaoyue He, Zhiguang Sun, Ping Liu, Caixia Liu
引用数: 23 • 2015
相关论文数: 1
A dual-mode proximity sensor with integrated capacitive and temperature sensing units
Shihua Qiu, Ying Huang, Xiaoyue He, Zhiguang Sun, Ping Liu, Caixia Liu
引用数: 23 • 2015