Lithography

Printing soft matter in three dimensions

Ryan L. Truby, Jennifer A. Lewis

Citations: 1576 • 2016

Designing Responsive Buckled Surfaces by Halftone Gel Lithography

Jungwook Kim, James Hanna, Myunghwan Byun, Christian D. Santangelo, Ryan C. Hayward

Citations: 872 • 2012

Millimeter-scale flexible robots with programmable three-dimensional magnetization and motions

Tianqi Xu, Jiachen Zhang, Mohammad Salehizadeh, Onaizah Onaizah, Eric Diller

Citations: 682 • 2019

Electronically integrated, mass-manufactured, microscopic robots

Marc Z. Miskin, Alejandro J. Cortese, Kyle Dorsey, Edward Esposito, Michael Reynolds, Qingkun Liu, Michael C. Cao, David A. Muller, Paul L. McEuen, Itai Cohen

Citations: 344 • 2020

Controlling the shape of 3D microstructures by temperature and light

Marc Hippler, Eva Blasco, Jingyuan Qu, Motomu Tanaka, Christopher Barner‐Kowollik, Martin Wegener, Martin Bastmeyer

Citations: 290 • 2019

A fast flexible ink-jet printing method for patterning dissociated neurons in culture

Neville E. Sanjana, Sawyer B. Fuller

Citations: 226 • 2004

Magnetic Assembly of Soft Robots with Hard Components

Sen Wai Kwok, Stephen A. Morin, Bobak Mosadegh, Ju‐Hee So, Robert F. Shepherd, Ramsés V. Martínez, Barbara S. Smith, Felice C. Simeone, Adam A. Stokes, George M. Whitesides

Citations: 167 • 2013

Microfabricated Deposition Nozzles for Direct‐Write Assembly of Three‐Dimensional Periodic Structures

Rama B. Rao, Karen Lee Krafcik, Alfredo Morales, Jennifer A. Lewis

Citations: 111 • 2005

Increasing the Dimensionality of Soft Microstructures through Injection‐Induced Self‐Folding

Tommaso Ranzani, Sheila Russo, Nicholas W. Bartlett, Michael Wehner, Robert J. Wood

Citations: 97 • 2018

Grayscale gel lithography for programmed buckling of non-Euclidean hydrogel plates

Jun‐Hee Na, Nakul Bende, Jinhye Bae, Christian D. Santangelo, Ryan C. Hayward

Citations: 88 • 2016

On‐Chip Generation of Structured Light Based on Metasurface Optoelectronic Integration

Qiu‐Hua Wang, Peinan Ni, Yiyang Xie, Qiang Kan, Peipei Chen, Pan Fu, Jun Deng, Tai‐Lai Jin, Hongda Chen, Ho Wai Howard Lee, Chen Xu, Patrice Genevet

Citations: 88 • 2021

Monolithic fabrication of ionic polymer–metal composite actuators capable of complex deformation

Zheng Chen, Xiaobo Tan

Citations: 86 • 2009

Mechanically interlocked 3D multi-material micromachines

Carlos Alcantara, Fabian C. Landers, S. Kim, Carmela De Marco, Daniel Ahmed, Bradley J. Nelson, Salvador Pané

Citations: 71 • 2020

A Highly Sensitive and Cost‐Effective Flexible Pressure Sensor with Micropillar Arrays Fabricated by Novel Metal‐Assisted Chemical Etching for Wearable Electronics

Xinyu Zhang, Yougen Hu, Han Gu, Pengli Zhu, Wenlong Jiang, Gang Zhang, Rong Sun, Ching‐Ping Wong

Citations: 63 • 2019

Fast and Facile Liquid Metal Printing via Projection Lithography for Highly Stretchable Electronic Circuits

Dong Wu, Shuwang Wu, Poom Narongdej, Sidi Duan, Chi Chen, Yichen Yan, Zixiao Liu, Wen Hong, Imri Frenkel, Ximin He

Citations: 62 • 2023

3D electron-beam writing at sub-15 nm resolution using spider silk as a resist

Nan Qin, Zhi‐Gang Qian, Chengzhe Zhou, Xiao‐Xia Xia, Tiger H. Tao

Citations: 60 • 2021

Funnel‐Shaped Microstructures for Strong Reversible Adhesion

Sarah C. L. Fischer, Katja Groß, Oscar Torrents Abad, Michael M. Becker, Euiyoung Park, René Hensel, Eduard Arzt

Citations: 53 • 2017

Emergent Soft Lithographic Tools for the Fabrication of Functional Polymeric Microstructures

M. Rose, John J. Bowen, Stephen A. Morin

Citations: 52 • 2019

E-Beam Nanostructuring and Direct Click Biofunctionalization of Thiol–Ene Resist

Reza Zandi Shafagh, Alexander Vastesson, Weijin Guo, Wouter van der Wijngaart, Tommy Haraldsson

Citations: 52 • 2018

Soft temperature-responsive microgels of complex shape in stop-flow lithography

Hanna J. M. Wolff, John Linkhorst, Tim Göttlich, Johann Savinsky, Andreas Krüger, Laura De Laporte, Matthias Weßling

Citations: 50 • 2019