Ju-Yi Lee

Papers

Total Citations

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About

Ju-Yi Lee’s research centers on precision manufacturing and semiconductor automation, with a specific focus on real-time wafer positioning during transfer processes. His major contributions lie in developing innovative optical sensing methods to enhance the accuracy and efficiency of wafer handling in fabrication environments. In his 2011 work, "Wafer positioning by laser scanning method," Lee proposed a system integrating a laser scanner and a scattering light receiver to detect wafer position as it passes a scanning line. His subsequent study, "A novel method for real-time wafer positioning during transfer process," introduced a dual line-shaped beam setup combined with CCD imaging for continuous, non-contact monitoring on a robot blade. Though his most-cited papers each hold 2 citations, their practical significance in semiconductor manufacturing is notable, addressing critical challenges in automation and yield improvement. Lee’s work exemplifies targeted engineering solutions for high-precision industrial applications, offering foundational insights for researchers in mechatronics and optical metrology. His contributions underscore the importance of real-time sensing in advanced manufacturing systems.