Jianyou Chen
Papers
1
Total Citations
2
H-Index
1
About
Jianyou Chen is a researcher whose work lies at the intersection of precision manufacturing and optical sensing, with a particular focus on semiconductor wafer positioning technologies. His most notable contribution is the development of a laser scanning method for wafer positioning, detailed in his 2011 paper. This method integrates a laser scanner system with a scattering light receiving system, where a laser beam is reflected into a scanning line on the sensing area. As a wafer passes this line, scattered light is captured, enabling highly accurate positioning. While his cited work has garnered 2 citations, its significance lies in its practical application for improving the efficiency and precision of semiconductor fabrication processes—a critical need in the industry. Chen’s research addresses a key challenge in wafer handling, offering a non-contact, real-time solution that enhances yield and reduces defects. His work is a valuable reference for engineers and researchers in optoelectronics and automation, demonstrating how innovative optical techniques can solve complex industrial problems.
Research Focus
Key Achievements
Top Papers
- 1Wafer positioning by laser scanning method2 citations · 2011