Automation of LSI manufacturing

Abstract

Totally automated lines for the production of DRAMs (dynamic random-access memories) and ASICs (application-specific integrated circuits) have been constructed using special production equipment, an automated guided vehicle, and a moving robot. Also developed was an IC card to assist the interaction of an automated system and humans. As a result of the automation, cleanliness was greatly improved both locally and in the entire clean room; the number of workers decreased to less than half of that of the conventional line; defects on the wafer caused by manual handling were greatly reduced; process data showed very tight distribution about the mean; and the number of lots rejected due to misoperation by workers greatly decreased. These results brought about a high and stable yield and improved the quality of the products.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>