Shape Memory Alloy and Elastomer Composite MEMS Actuators

Abstract

A process for fabrication of shape memory alloy MEMS actuators on a elastomeric polymer substrate is described. These actuators are designed for use on innovative soft body robots. Patterned shape memory alloy (nitinol) is sputter deposited on a polyimide mesh structure. The mesh substrate acts as a bias spring to de-twin the shape memory alloy in the martensite phase. Significant portions of the structure have been fabricated, but the nitinol anneal has not been successful, nor has the shape memory eect been demonstrated. Refinement of the fabrication process is ongoing.