OTHER
Implementation of a piezoresistive MEMS cantilever for nanoscale force measurement in micro/nano robotic applications
Deok‐Ho Kim, Byungkyu Kim, Jong-Oh Park
- Year
- 2004
- Citations
- 15
Keywords
Piezoresistive effectCantileverMicroelectromechanical systemsNanoscopic scaleMaterials scienceNanotechnologyNano-NanomechanicsOptoelectronicsAtomic force microscopy
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