OTHER
Implementation of a piezoresistive MEMS cantilever for nanoscale force measurement in micro/nano robotic applications
Deok‐Ho Kim, Byungkyu Kim, Jong-Oh Park
- 发表年份
- 2004
- 引用次数
- 15
关键词
Piezoresistive effectCantileverMicroelectromechanical systemsNanoscopic scaleMaterials scienceNanotechnologyNano-NanomechanicsOptoelectronicsAtomic force microscopy
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