Micromotor assembly using high accurate optical vision feedback for microrobot relative 3D displacement in submicron range

Abstract

Our project is to develop a high precision tracking system to guide the newly developed microrobot during a microassembly task. Due to the working space of the Cl-robot, it has been necessary to develop new techniques to cope with manipulation of microsystems, visualization, simulation and positioning in general as also described in this article. A micro robot capable of manipulating micro systems and micro structures with a resolution higher than 10 nm and a vision feedback allowing a sub micron absolute, and nanometric relative positioning has been successfully developed and tested. A LIGA-micromotor has been successfully assembled.