Direct coupling system between nanometer world and human world

Abstract

A nanomanipulator system, called the nanorobot system, which allows humans to experience the nanometer world with their own sensitivities is proposed. The nanorobot system consists of left and right hand robots with highly sensitive force sensors in the chamber of stereo scanning electron microscope (SEM) which gives three-dimensional magnified image of the process site. A prototype of the nanorobot system is described. The effectiveness of the prototype system is demonstrated by the production of a microswitch in an aluminum substrate.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>