Electron-beam lithography
相关论文数: 11
顶级研究者
最高引用论文
3D electron-beam writing at sub-15 nm resolution using spider silk as a resist
Nan Qin, Zhi‐Gang Qian, Chengzhe Zhou, Xiao‐Xia Xia, Tiger H. Tao
引用数: 60 • 2021
E-Beam Nanostructuring and Direct Click Biofunctionalization of Thiol–Ene Resist
Reza Zandi Shafagh, Alexander Vastesson, Weijin Guo, Wouter van der Wijngaart, Tommy Haraldsson
引用数: 52 • 2018
Three-Dimensional Soft Material Micropatterning via Direct Laser Lithography of Flexible Molds
Irene Bernardeschi, Omar Tricinci, Virgilio Mattoli, Carlo Filippeschi, Barbara Mazzolai, Lucia Beccai
引用数: 23 • 2016
EBES4: A new electron-beam exposure system
D. S. Alles, C. J. Biddick, John H. Bruning, J.T. Clemens, R.J. Collier, E. A. Gere, L. R. Harriott, F. Leone, R. Liu, Timothy Mulrooney, Richard J. Nielsen, Neha Paras, R. M. Richman, C. M. Rose, Dov Rosenfeld, D. E. A. Smith, M. G. R. Thomson
引用数: 19 • 1987
Two-photon laser lithography in optical metrology
Julian Hering, Matthias Eifler, Jörg Seewig, Georg von Freymann, Linda Hofherr, Christiane Ziegler
引用数: 12 • 2018
A sub-micron metallic electrothermal gripper
Daniel Sang-Won Park, Arun K. Nallani, DonKyu Cha, Gil-Sik Lee, Moon J. Kim, George D. Skidmore, Jeong‐Bong Lee
引用数: 12 • 2009
Macrophage-compatible magnetic achiral nanorobots fabricated by electron beam lithography
Teng Jiang, Xiaoxia Song, Xueliang Mu, U Kei Cheang
引用数: 8 • 2022
Patterned, morphing composites <i>via</i> maskless photo-click lithography
Shida Lyu, Fei Zheng, Julio Adrian Aguilar-Tadeo, Fei Lin, Rui Wu, Brian Derby, Ian A. Kinloch, Constantinos Soutis, Matthieu Grésil, Jonny J. Blaker
引用数: 3 • 2020
Direct Patterning of Ionic Polymers with E-Beam Lithography
Annina M. Steinbach, Stefan Jenisch, Parisa Bakhtiarpour, Masoud Amirkhani, Steffen Strehle
引用数: 2 • 2016
<title>New electron-beam mask writing system for 0.25-um lithography</title>
Hidetoshi Satoh, Yasuhiro Someda, Norio Saitou, K. Kawasaki, Kazui Mizuno
引用数: 2 • 1996
In-Situ Ring Assembled Inner Tubular Fabrication by Optofluidic Maskless Lithography for Soft Robotics and Medical Devices Inspired From Segment Construction of Shield Tunnel Technology
Yingzhe Wang, Keisuke Morishima
引用数: 1 • 2025