BASIC RESEARCH OF MICRO ROBOT STRUCTURE AND CONTROL

摘要

This paper describes a new device developed for biological of medical robot.Piez-oelectrical element and circular notched mechanism are used for position control.The“Exact Model Matching”method is used to design the system.The controlled rangeof position is about 50μm.The system BW is 1kHz and over,with accuracy 0.1μm.