Key Technologies of Micro-electromechanical System and Its Recent Progress

摘要

Micro-electromechanical system(MEMS),developed on the basis of microelectronics,is a scientific research frontier of multi-disciplines and assimilates the most advanced achievements in current research and development.MEMS extends into various fields with wide application prospects,such as automotive electronics,aeronautics and astronautics,information communication,biomedicine,auto-control and defense industry,et al.This paper introduces the background of MEMS development and its basic theory research.The key technologies of MEMS such as device design,fabricating material,three advanced machining processes(silicon micromachining,precision micromachining and LIGA technique),micro-packaging and testing are reviewed.Further more,the typical applications and latest development in fields including micro/nano-sensor,micro-actuator,micro-robot,micro air vehicle,micro-power energy system,micro biological chip are discussed,and lastly the future development of MEMS is put forward.A good many of advanced MEMS devices are hopeful put into practicality and industrialization from laboratory in recent decades.