Macro/micro manipulator based on PZT actuator

摘要

Macro/Micro manipulators overcome the limitations of conventional positioning system, and satisfy the requirements of large travel range, high speed and high accuracy at the same time. As a novel actuator, PZT is effective in the field of Macro/Micro positioning for its compact size, higher resolution of displacement, non-friction and non - backlash. Current overseas situations and the research of the Robot Research Institute of HIT on Macro/Micro manipulators based on PZT are duscussed too. Macro/Micro manipulators are applied in many fields such as precision assembly, fiber alignment system, IC bonding, biologic engineering, flexible manipulator and so on.