Modeling of beam type solar cell substrate handling robot

摘要

There are some researches about the deflection and the vibration of the robot used in the LCD and solar cell manufacturing line. The deflection and the vibration of the robot end-effector is a very important issue in the large substrate handling because the substrate handling technology has much effect on productivity. In the paper, we compared the simulation result with the experimental result about the deflection of the robot end-effector and obtained the preciser model including the robot fork and the robot arms.