Nano Robotic Manipulator Positioning Accuracy Measurement By Secondary Electron Image

摘要

In order to perform nano-manipulation more accurately, it is necessary to study the relationship between the scanning electron microscope (SEM) image and the actual length. In this paper, based on the secondary electron image, the displacement of 1.81nm in SEM was measured the actual displacement was obtained according to the change of the pixels, so as to realize the nanometer displacement calibration and real-time measurement of the nano robot manipulator in SEM. According to the magnification, resolution and scale bar of SEM image, the mapping relationship between pixels and actual length was established. The obvious feature point and area in the SEM image were selected to be marked. The driving signal was applied to the manipulator of the nano robot, and the template matching algorithm was used to track the feature point and area in real time. The change of the feature point in the SEM image was obtained, and the actual displacement of the manipulator was calculated according to the mapping relationship between the pixel points and the actual displacement. We calibrated the displacement of the nanorobots and measured the actual displacement in real time, which laid a foundation for the precise control of the nanorobots in the future.