3D rotating octagonal micromirror optical scanner: design, fabrication, and assembly

摘要

The paper present the design and the construction of a novel 3-D micromirror optical scanner for use in a swept-source optical coherence tomography (SS-OCT) that is based on external-cavity tunable lasers. The 3D rotating octagonal micromirror consists of a rotary platform, onto which the micromirrors are assembled in an octagonal configuration. The 3D optical scanner was constructed in a two stage process. It was first fabricated using surface micromachining PolyMUMPs fabrication process, and then assembled using a robotic micromanipulator system. The microassembly process is a robotic-based process based on the PKMIL system.The methodology to construct the micromirror and the design of the micromirror parts, and the results of the assembly process are presented, along with examples of prototype of the 3D micromirrors.